Fabrication of three-dimensional photonic crystals by holographic lithography

机译：全息光刻技术制作三维光子晶体

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摘要

Three-dimensional photonic crystals have been successfully fabricated in a photoresist by four-wave interference, where incident wave directions were set by considering the equation for interference fringe and that between lattice and reciprocal lattice vectors.

机译：已经通过四波干涉在光致抗蚀剂中成功地制造了三维光子晶体，其中通过考虑干涉条纹方程以及晶格和倒数晶格矢量之间的方程来设置入射波方向。

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来源
《The Sixth Topical Meeting on Diffractive Optics and Micro-Optics (DOMO) Jun 3-6, 2002 Tucson, Arizona》|2002年|p.256-258|共3页
会议地点 Tucson AZ(US);Tucson AZ(US)
作者
Yuzo Ono; Kiyokatsu Ikemoto;
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作者单位

Graduate School of Science and Engineering, Ritsumeikan University 1-1, Nojihigashi 1-chome, Kusatsu, Shiga 525-8577, Japan;

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会议组织
原文格式 PDF
正文语种 eng
中图分类物理学;
关键词
photonic crystals; diffiractive optics;

机译：光子晶体；衍射光学;
入库时间 2022-08-26 13:46:49

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2. Fabrication of three-dimensional photonic crystals with two-beam holographic lithography [J] . Ying Liu, Shou Liu, Xiangsu Zhang Applied optics . 2006,第3期

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3. Fabrication of large area two- and three-dimensional polymer photonic crystals using single refracting prism holographic lithography [J] . Lijun Wu, Yongchun Zhong, Che Ting Chan, Applied Physics Letters . 2005,第24期

机译：使用单折射棱镜全息光刻技术制造大面积二维和三维聚合物光子晶体
4. HOLOGRAPHIC LITHOGRAPHY AND TWO-PHOTON LITHOGRAPHY FOR THE FABRICATION OF WAVEGUIDE DEFECTS IN THREE-DIMENSIONAL PHOTONIC CRYSTALS [C] . Kris Ohlinger, Yuankun Lin, Faraon Torres, International Congress on Applications of Lasers and Electro-Optics . 2010

机译：全息光刻和两光子光刻，用于制造三维光子晶体中的波导缺陷
5. A theoretical investigation of a dual-beam holographic lithography method for the fabrication of omnidirectional photonic crystals. [D] . Mnaymneh, Khaled. 2003

机译：用于全向光子晶体制造的双光束全息光刻方法的理论研究。
6. The polarization modulation and fabrication method of two dimensional silica photonic crystals based on UV nanoimprint lithography and hot imprint [O] . Shuai Guo, Chunhui Niu, Liang Liang, -1

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7. Fabrication of hetero-binary and honeycomb photonic crystals by one-step holographic lithography [O] . Wu, LJ, Zhong, YC, Wong, KS, 2006

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Fabrication of three-dimensional photonic crystals by holographic lithography

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