Three-dimensional implantation profiles; The ratio of lateral to longitudinal straggling

摘要

The presently available database on lateral and longitudinal range stragglings of energetic particles implanted into amorphous solids has been compared with theoretical predictions, and the agreement is fount to be, in general, good. The lateral-lto-longitudinal ratio is below 1 for is not an element of < 0.1, above l for is not an element > 1, and around l for 0.1 <=is not an element of<=1, where is not an element of is the generalized energy. In a few cases deviations have been found fromthis genral trend which are attributed to thermal or radiation enhanced diffusion (RED).