A low cost sensor concept based on RfIS was developed. Fig. 5 shows the design used for the final calculations. The principle allows to measure thickness changes in range of 0.1 to 10 μm with high accuracy. Sensor sizes are in the area of 3mm × 3mm × 2mm. In future the sensor can be used in biochemical and environmental applications. Additional features like temperature sensor, reference diodes and housing concepts will be realized.
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