Fine-line Patterning of Transparent Ga-doped ZnO Thin Films by Wet-etching

机译：湿法刻蚀透明掺杂Ga的ZnO薄膜的细线构图

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Ga-doped ZnO (GZO) films have attracted significant recent attention as an alternative to the optically transparent electrodes made of indium tin oxide (TTO) currently used in electronic devices such as LCDs (1,2), touch-screens and solar cells.

机译：镓掺杂的ZnO（GZO）膜作为光学透明电极的替代品已引起了近期的广泛关注，该光学透明的电极目前是用于LCD（1,2），触摸屏和太阳能电池等电子设备中的铟锡氧化物（TTO）制成的。

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《Semiconductors, metal oxides, and composites: Metallization and electrodeposition of thin films and nanostructures 》|2009年|p.25-34|共10页
会议地点 Vienna(AT);Vienna(AT)
作者
Naoki Yamamoto; Satoshi Okabe; Masahide Matsubara; Taketo Maruyama; Hisao Makino; et al;
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作者单位

Research Institute, Kochi University of Technology,Tosayamada-cho, Kami-shi, Kochi 782-8502, Japan;

Tokyo Research Lab., Mitsubishi Gas Chemical Co., Inc.,Niijyuku, Katsushika-ku, Tokyo 125-0051, Japan;

Tokyo Research Lab., Mitsubishi Gas Chemical Co., Inc.,Niijyuku, Katsushika-ku, Tokyo 125-0051, Japan;

Electronic Chemicals Department, Inorganic Chemicals Division,Mitsubishi Gas Chemical Co., Inc.,Marunouchi 2-Chome, Chiyoda-ku, Tokyo 100-8327, Japan;

Research Institute, Kochi University of Technology,Tosayamada-cho, Kami-shi, Kochi 782-8502, Japan;

et al;

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4. Fine-line Patterning of Transparent Ga-doped ZnO Thin Films by Wet-etching [C] . Naoki Yamamoto, Satoshi Okabe, Masahide Matsubara, Symposium on semiconductors, metal oxides, and composites: Metallization and electrodeposition of thin films and nanostructures . 2010

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5. Optical and electronic properties o f CdTe, CdS, ITO and ZnO transparent thin films and their junctions. [D] . Wary, Ganesh Ch. 2006

机译：CdTe，CdS，ITO和ZnO透明薄膜及其结的光学和电子特性。
6. Comparative studies of Al-doped ZnO and Ga-doped ZnO transparent conducting oxide thin films [O] . Min-Chul Jun, Sang-Uk Park, Jung-Hyuk Koh 2012

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7. Comparative studies of Al-doped ZnO and Ga-doped ZnO transparent conducting oxide thin films [O] . Min-Chul Jun, Sang-Uk Park, Jung-Hyuk Koh 2012

机译：Al掺杂ZnO和Ga掺杂ZnO透明导电氧化物薄膜的比较研究

Fine-line Patterning of Transparent Ga-doped ZnO Thin Films by Wet-etching

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