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Structural and electrical properties of InN nanowires grown by chemical vapor deposition

机译:通过化学气相沉积生长的InN纳米线的结构和电性能

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InN is one of the most interesting materials among all group III–V nitrides for semiconductor device and sensor applications due to its direct band gap in the infrared range, smallest effective mass and highest electron drift velocity. Although several studies on InN NW growth [1], optical [1], and electronic [2] properties have been reported in recent days, there are issues with low growth rates (a few microns per hour), nonuniform cross-sections, and large variations in the material properties. Also planar growth of InN NWs has been difficult to achieve which results expensive, and complicated device fabrication process limiting the applications of these NWs. This has motivated researchers worldwide to explore controlled growth of high quality InN NW, and simple, yet effective, device fabrication process.
机译:InN是其在红外范围内的直接带隙,最小的有效质量和最高的电子漂移速度,在半导体器件和传感器应用的所有III-V族氮化物中是最有趣的材料之一。尽管最近几天对InN NW生长[1],光学[1]和电子[2]性质进行了几项研究,但仍存在生长速率低(每小时几微米),横截面不均匀以及材料特性差异很大。同样,难以实现InN NW的平面生长,这导致昂贵且复杂的器件制造工艺限制了这些NW的应用。这激励了全世界的研究人员探索高质量InN NW和简单但有效的器件制造工艺的受控增长。

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