MEMS BASED POSITION AND MOTION SENSORS FOR CONTROLLING COMPLEX PARALLEL MECHANISMS IN THE ROBOT CENTAUROB RESPECTIVELY PRODUCTION MACHINES GENERALLY

摘要

For effective control of motion in machines, measurements of positions, displacements, tilts, velocities, accelerations, vibrations, etc. are necessary. Sensors employed to measure such parameters have to be optimally selected and integrated based on given application requirements in order to assure efficient, accurate, and reliable functioning of the machine system. Because of too many competing motion sensors in the market, it is easy to lose sight in the search process, if the selection is not done in systematic way. Sensors are by nature very diverse system components both functionally and constructionwise. The goal here is to develop an accurate, reliable, future oriented and cost effective sensor solution for real time pose determination of parallel mechanisms in general and balance control of the biped robot Centaurob in particular. Technology-wise, mainly Microelectromechanical systems (MEMS) based sensors are explored.