CORRELATION BETWEEN THE OPTICAL, ELECTRICAL AND STRUCTURAL PROPERTIES OF FLUORINE DOPED TIN OXIDE THIN FILMS

摘要

Thin films of SnO2:F were deposited by spray pyrolysis technique. The electrical, optical and structuralrnproperties of these films were investigated as a function of doping concenteration . The best electro opticalrnproperties were achieved for Ts = 550.C and fluorine concenteration of 5 W% (Rsh =sheet resistance = 8rnOhms per square and T = 45.6 % transmission at 550 nm).