Numerical Analysis of Silicon Micromachined Gas Pendulum Tilt Sense Organ Temperature Field

摘要

An analysis of the sensitive mechanism of silicon micromachined gas pendulum tilt sense organ is made. Adopting the method of FEA (finite element analysis), the temperature field at two points heat source, when the two-dimensional enclosure was inclined, was obtained by application of the program ANSYS-FLOTRAN CFD and a series of procedures, such as modeling, meshing, loading and equation solving. The numerical results show that in the level state, the temperatures at two points heat source are two points in the same isotherm; however, the temperatures are not the same when the enclosure is inclined. The difference of the temperatures will increase with the augment of the tilt angle, and contrarily it will decrease. That is the characteristic used to sense the transformation of obliquity.