Thin Film Nanocomposites for Gas Sensors

摘要

Nanocomposites on the base of thin films SnO_2 with additives of metal oxides such as SiO_2, ZrO_2, MnO_2 and others, were prepared by reactive ion-beam sputtering of metal target in the ambient of O_2 + Ar, and then thermal treated at 500℃. Atomic composition and morphology of thin film nanocomposites were investigated. Electrical properties and gas sensitivity of nanocomposites were studied. It was determined that the grain size of polycrystals depends on the film composition and can run down to 10 nm. It was found that temperature of maximal gas sensitivity of the films depends on their composition as well and it can be decreased by 100℃～150℃ lower than temperature of maximal sensitivity of undoped films SnO_2.