In-situ monitoring of semiconductor wafer temperature using infrared interferometry

摘要

Abstract: The Tempest is a self contained, noncontact, noninvasive in situ temperature monitoring device for use with semiconductor substrates. Its new technology uses IR-laser interferometry and offers outstanding accuracy over a broad temperature range. The Tempest can sense changes in wafer temperature with an absolute accuracy of $PLU@/$MIN 2 K over a range of 77 K (liquid nitrogen) to 1000 K (well above typical CVD temperatures).!4