Liquid Sensor in Multi-Functional Integrated Circuit

摘要

We performed examination of a micro pump and a glucose sensor as examination of the composition element of a nano sensing system. The micro pump is used for flux control of samples, such as a liquid and gas. That is made of two layers with a piezo-electric material and glass using MEMS technology. The micro pump was able to control fluid by high accuracy of several nl/V. We tried to examine a glucose concentration by measurement of impedance changes. This experimental result is indicated that glucose sensor by measurement of impedance changes is a new substitution of glucose sensor by sensing an near-infarction.