Development of a Novel Compact 3-DOF Out-of-plane Stage

摘要

In this study, a novel 3-DOF out-of-plane stage is proposed and optimized. The stage attain 100 μm in Z direction and ±mrad in θ_(xy) direction. Size of the stage is l50×150×30mm~3 . Future work includes the fabrication of this stage with final dimension and experiments with the manufactured stage.