Simulations and analysis of microgyroscope response in drive and sense directions

摘要

This paper presents developed mathematical model of MEMS gyroscope in Matlab/SIMULINK environment. This model was created with standard SIMULINK library, so it can be used commonly. It uses blocks which have been used for some years and they are compatible backwards with previous versions of SIMULINK. This model can be very useful for calculating MEMS gyroscope parameters especially geometrical ones because these have huge impact on device response and possibilities of application. In this paper output characteristics of MEMS gyroscope are presented in both orthogonal directions, this gives quick overview of behavior this kind of microgyroscope.