CALIBRATION OF COORDINATE MEASURING MACHINES USING INTERFEROMETRIC METHOD

摘要

An optical noncontact method is described for calibration of coordinate measuring machines using interference of light and a length normal (ball bar, ball plate), composed of parts of spherical optical surfaces, is proposed and realized. A theoretical analysis of an accuracy of the centre position of the spherical surface of the normal is carried out and an experimental verification of the measurement accuracy is performed with two kinds of interferometers. The proposed technique can be used for calibration and checking of CNC machines. It is also proposed a procedure of calibration of the ball plate using a spherointerferometer.