Design and simulation of corrugated diaphragm applied to the MEMS fiber optic pressure sensor

摘要

In this paper, we propose a corrugated diaphragm applied to the fiber optic pressure sensor which needs a wide sensing range and a large deflection. The corrugated diaphragm can effectively improve the sensitivity of the sensor has been proved by ANSYS simulation. The stress concentration is weakened after the silicon is chamfered into corrugated diaphragm by isotropic etching process. The sensitivity of the corrugated diaphragm can reach to 0.44μ m/MPa which is two times larger than that of the same size planar diaphragm. The maximum sensing stress is up to 14MPa.