压力传感器封装中的波纹膜片结构研究

摘要

针对压力传感器隔离式封装中的波纹膜片这一关键部件，采用有限元分析的方法研究了波纹膜片的厚度、波纹深度和波纹数目分别对最大压力约0.1 MPa下的压力传感器输出信号的影响，优化了波纹膜片结构的参数选择。通过对封装了不同波纹膜片的样品的测试与比较表明，较小的膜厚与波纹深度、较多的波纹数目有助于提高压力传感器的性能，从而验证了波纹膜片结构优化的正确性。%Corrugated diaphragm is one of the most important isolated packaging parts for pressure sensor. The impacts of thickness, depth and number of corrugation of corrugated diaphragm on output signal of pressure sensor with the maximum pressure value of approximately 0.1 MPa are researched by ifnite element analysis. Structure parameters of corrugated diaphragm are optimized. Corrugated diaphragm structure optimization is veriifed by results of testing and comparing samples using different corrugated diaphragms. The results showed, performances of pressure sensor can be improved by smaller thickness and corrugation depth, more number of corrugations.