Shrinkage Free Sintering of Low Temperature Cofired Ceramics by Glass Infilteration

摘要

The shrinkage variation of Low Temperature Cofired Ceramics(LTCC) limits the size of the substrates that impose limitations on embedded passive components. This paper focuses on the method of minimizing or controlling planar shrinkage and reducing distortion during firing. The laminated sheets of alumina and glass were sintered at varying temperature, and depending on the amount of the glass ceramics. When the sintered of multi-layer structure with Al_2O_3/Glass/Al_2O_3, the glass infiltrated entirely into Al_2O_3 layer at the temperature of about 950 ℃ or higher.