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3D silicon infrared photonic lattices

机译:3D硅红外光子晶格

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Abstract: 3D photonic lattices are engineered 'materials' which are the photonic analogues of semiconductors. These structures were first proposed and demonstrated in the mid-to-late 1980's. However, due to fabrication difficulties, lattices active in the IR are only just emerging. A variety of structures and fabrication approaches have been investigated. The most promising approach for many potential applications is a diamond-like structure fabricated using silicon microprocessing techniques. This approach has enabled the fabrication of 3D silicon photonic lattices active in the IR. The structures display bandgaps centered from 12$mu down to 1.55$mu@, depending on pitch. !23
机译:摘要:3D光子晶格是工程化的“材料”,是半导体的光子类似物。这些结构最早是在1980年代中期提出并证明的。但是,由于制造上的困难,IR中活跃的晶格才刚刚出现。已经研究了多种结构和制造方法。对于许多潜在应用而言,最有希望的方法是使用硅微处理技术制造的类金刚石结构。这种方法使得能够制造在IR中有效的3D硅光子晶格。根据间距,结构显示的带隙从12μs到1.55μm@不等。 !23

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