Optical coherence tomography as film thickness measurement technique

摘要

Optical coherence tomography (OCT) is a powerful optical method, noninvasive and noncontact diagnostic method. Although it is usually used for medical examinations, particularly in ocular exploration; it can also be used in optical metrology as measure technique. In this work, we use OCT to measure thicknesses of films. In OCT, depth profiles are constructed by measuring the time delay of back reflected light by interferometry measurements. Frequency in k-space is proportional to optical path difference. Then the reflectivity profile is obtained by a Fourier transformation, and the difference between two successive peaks of the resulting spectrum gives the film thickness. Several films, food-type, of different thicknesses were investigated and the results were very accurate.