A Specialized Cell-wise OPC Method for OPC-Unfriendly Spot Detection

摘要

To reduce design spin time, OPC-unfriendly spots in IC layout should be found out by designer before tape-out. This can be done by firstly running a "trial OPC" step on the layout, followed by running an ORC step to verify the result. In this paper we introduce a specialized cell-wise OPC method using an edge bias modeling method to improve the accuracy while keeping the advantage on correction speed, which is dozens of times faster than traditional model-based OPC method. This makes the algorithm a good choice for "trial OPC".