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Plasma and Chemical Treatments of Polyimide 'Sacrificial' Layers in Processing of Microbolometrs

机译:微量药物处理中聚酰亚胺“牺牲”层的等离子体和化学处理

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Methods and objectives of plasma and chemical treatments of thin polyimide (PI) coatings used as "sacrificial" layers in microbolometer processing have been analysed. Physical and chemical effects and mechanisms of surface plasma and chemical treatment of PI layers and their anisotropic plasma etching with given wall sloping angles and from a gap have been integrated. Revealed mechanisms enabled to optimize PI plasma and chemical treatment parameters in processing of microbolometer matrices of sizes 2x48, 160x120 and 320x240 pixels.
机译:分析了在微辐射热计处理中用作“牺牲”层的薄聚酰亚胺(PI)涂层的等离子体和化学处理的方法和目的。已经综合了表面等离子体的物理和化学作用,机理以及PI层的化学处理以及在给定的壁倾斜角度和间隙下的各向异性等离子体蚀刻。揭示的机制能够在处理大小为2x48、160x120和320x240像素的微辐射热计矩阵时优化PI血浆和化学处理参数。

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