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Integration of silicon bench micro-optics

机译:集成硅台式微光学

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Abstract: Silicon v-groove structures have been utilized for passive positioning of optical fiber for fiber optic and opto- electronic applications. In this paper, we will present our results of using micro-machined silicon v-groove arrays to passively align optical fiber arrays to micro rod optics. We will also demonstrate the integration of N fiber arrays bonded into the silicon v-groove with a 1xN micro lens array, which is composed of a 2 inch-phase level diffractive optics. For the assembly of 1x6 fiber array and lens array with 16 phase level diffractive optics, the experimental results indicated that total insertion loss per link is typically 1.5-2.0 dB/channel. !13
机译:摘要:硅v形沟槽结构已被用于光纤和光电应用的光纤的被动定位。在本文中,我们将介绍使用微机械加工的硅V型槽阵列将光纤阵列被动对准微棒光学器件的结果。我们还将演示将N光纤阵列与1xN微透镜阵列集成到硅v形凹槽中的方法,该透镜阵列由2英寸相位的水平衍射光学器件组成。对于具有16个相位水平衍射光学元件的1x6光纤阵列和透镜阵列的组装,实验结果表明,每条链路的总插入损耗通常为1.5-2.0 dB /通道。 !13

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