Silicon optical bench for packaging optical switch device, optical switch package using the silicon optical bench, and method for fabricating the silicon optical bench

摘要

A silicon optical bench for packaging an optical switch device is provided. The silicon optical bench includes a silicon substrate. The silicon substrate includes a first region where the optical switch device will be installed, a second region placed on a first side of the first region so as to allow an optical input unit to be installed therein, and a third region placed on a second side of the first region so as to allow an optical output unit to be installed therein. Here, a cavity is formed in the first region through the silicon substrate, and grooves are arranged in the second and third regions of the silicon substrate so that a lens and an optical fiber for defining optical fibers can be installed in the grooves.