Optical Roughness Measurements on Specially Designed Roughness Standards

摘要

The measurement of surface texture is one of the most common and important ways to judge the quality of a technical surface. In order to verify whether a metrology device is able to measure certain types of roughness accurately, various roughness standards with calibrated roughness values are available. While almost all roughness standards produced so far have been designed for tactile systems we demonstrate how the optical metrology device InfiniteFocus can be applied to special roughness standards that have been artificially roughened. Experiments are performed on standards with periodic structure and the results of the optical system are compared to the calibrated values obtained by tactile systems with different tip radius. Additionally the profile-based measurements are compared to area-based measurements conform to a recently developed ISO standard draft. Finally roughness measurements on real surfaces are presented.