PROBLEM TO BE SOLVED: To remove only noise peculiar to a measuring device from a roughness cross-section curve even when noise peculiar to a measuring device and a roughness shape coexist in the same region, a roughness cross-section curve evaluation method and a roughness analysis device. And a roughness analysis program, and a roughness measurement method and a roughness measurement device that employ such a roughness cross-section curve evaluation method are provided. SOLUTION: The roughness spectrum of the measurement target is generated by Fourier transforming the measurement cross-sectional curve of the measurement target, and the roughness spectrum of the reference plane is obtained by Fourier transforming the measurement cross-sectional curve of the reference plane measured in advance. By subtracting the roughness spectrum of the reference plane from the generated roughness spectrum of the measurement target, noise is removed from the roughness spectrum of the measurement target, and the roughness spectrum of the measurement target after noise removal is inverse Fourier transformed. By doing so, a cross-sectional curve to be measured is generated. [Selection diagram] Fig. 1
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