The present invention has been obtained by a two-dimensional laser displacement meter, a moving mechanism for moving the two-dimensional laser displacement meter in the X-axis direction, a moving distance measuring device for measuring the moving distance in the X-axis direction of the two-dimensional laser displacement meter, and a two-dimensional laser displacement meter. A three-dimensional surface roughness evaluation apparatus having a computing device for generating three-dimensional surface roughness data of a measurement object based on the displacement data and the moving distance data acquired by the moving distance measuring device, wherein the two-dimensional laser displacement meter has a predetermined interval. The width direction of the two-dimensional laser displacement meter is arranged to coincide with the Y-axis direction so that the displacement data of the Y-axis coordinate can be measured every time, and the measurement width of the two-dimensional laser displacement meter is at least twice the average length RSm of the element to be measured. As described above, the computing device averages the displacement data acquired at regular intervals in the X-axis direction by the two-dimensional laser displacement meter in the Y-axis direction and The reference plane data of the coordinates is generated, and the reference plane data of each coordinate is subtracted from the displacement data of each X-Y plane coordinate, thereby generating three-dimensional surface roughness data of the measurement target.
展开▼
