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Methods and devices for check-up of content of contamination in liquid media with low absorbability

机译:检查吸收性低的液体介质中污染物含量的方法和装置

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Abstract: The demands of purity of liquid media with low absorbability such as photoresist used in microelectronics production of light oil-products are enhanced at present. Particular attention is given to developing of methods and devices for estimation of liquid purity. In this report the methods and the analyzers, developed at Applied Physics Institute of Ivan Franko State University, intended for checking the content of the microparticles larger than 0.3 $mu@m in liquid photoresist or light oil-products are considered.!81
机译:摘要:目前对低吸收性液体介质的纯度提出了更高的要求,例如用于微电子生产轻质油产品的光刻胶。特别注意用于估计液体纯度的方法和装置的开发。在本报告中,考虑了由伊凡·弗兰科州立大学应用物理研究所开发的方法和分析仪,旨在检查液体光刻胶或轻油产品中大于0.3μm的微粒的含量。81

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