Nanostructure of a-C:N films characterized by Raman spectroscopy

摘要

Abstract: Amorphous carbon films prepared by nitrogen ions assisted thermal evaporation were analyzed by means of Raman scattering. It was shown that ion bombardment of substrate during carbon evaporation leads to a nanostructure reordering. It was analyzed the changes of Raman spectra characteristics with variation of ion bombardment conditions.!6