Design and fabrication of a planar, resonant Franz-Keldysh opticalmodulator

摘要

The authors describe the design, fabrication and performance of anplanar, resonant Franz-Keldysh modulator which has produced a 38%ntransmission change for 20 V applied bias. The device consists of anreverse biased GaAs pin diode grown by MOVPE and from which thensubstrate has been removed