The Optimisation of a resonant gas sensor by using nano-textured surfaces

摘要

This paper describes the potential for optimising a resonant gas sensor by using nano-textured surfaces. Initial empirical calculations determined that a device with a nano-textured active layer could have its surface area increased by an order of magnitude when compared to a device with an ideal theoretical smooth surface. These nano-textured surfaces are achieved when using the author's one step DRIE process. By carefully choosing the parameters when using the one step process the underside can be made to mimic porous silicon giving the user this vastly increased surface area on a micro and nano scale. After explaining how these surfaces are obtained this paper goes on to detail modelling work carried out to demonstrate the possible effects this new textured surface could have on the performance of future resonant gas sensors. A simple generic resonator is modelled with and without the new surface to give a clear indication of the improvement in signal performance that can be expected from future devices utilizing this new pseudo porous silicon as its active layer.