首页> 外文会议>The Ninth Asian thermophysical properties conference (ATPC 2010). >ELECTRICAL TRANSPORT PROPERTIES OF THERMALLY EVAPORATED ZINC SELENIDE (ZnSe) THIN FILMS
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ELECTRICAL TRANSPORT PROPERTIES OF THERMALLY EVAPORATED ZINC SELENIDE (ZnSe) THIN FILMS

机译:热蒸发的硒化锌薄膜的电输运性质

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Thin films of Zinc Selenide (ZnSe) of various thicknesses have been deposited onto glass substrates using thermal evaporation technique at room temperature and elevated temperatures. The structural property of the films was studied by X-ray diffraction method and found to be polycrystalline in nature. From the electrical studies of the films it was seen that the as-deposited films were unstable. The films were annealed in vacuum and subjected to several heating and cooling cycles (at temperature rate 5 K/min) up to a temperature of 523 K. From the reproducible resistivity-temperature characteristic, the proper annealing condition was attained. It is found that electrical conductivity of the stabilized ZnSe films increases with increase of substrate temperature upto 453 K and it was about 27×10-4 ohm-1 m-1. The dark electrical resistivity calculations were carried out at different temperatures in the range 298-393 K. The current density-voltage characteristics of ZnSe film at room temperature showed ohmic conduction mechanism at low voltages. At higher voltages the spacecharge limited conduction (SCLC) accompanied by an exponential trap distribution was dominated. Transport properties of the material at ambient temperature have been obtained from the analysis of the samples in the ohmic and SCLC regions.
机译:使用热蒸发技术在室温和高温下,将各种厚度的硒化锌(ZnSe)薄膜沉积到玻璃基板上。通过X射线衍射法研究了膜的结构性质,发现其本质上是多晶的。从薄膜的电学研究可以看出,沉积的薄膜是不稳定的。将膜在真空中退火,并经受几次加热和冷却循环(在5 K / min的温度速率下),直至温度达到523K。根据可再现的电阻率-温度特性,获得了适当的退火条件。发现稳定的ZnSe膜的电导率随衬底温度升高至453 K而增加,并且约为27×10-4 ohm-1 m-1。暗电阻率计算是在298-393 K范围内的不同温度下进行的。室温下ZnSe膜的电流密度-电压特性显示出低电压下的欧姆传导机制。在较高的电压下,伴有指数陷阱分布的空间电荷受限传导(SCLC)占主导地位。通过在欧姆和SCLC区域中对样品进行分析,可以获得材料在室温下的传输性能。

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