Laser Postionization Secondary Neutral Mass Spectrometry for Analysis on the Nanometer-Scale - The Followup

摘要

The SARISA laser post-ionization secondary neutral mass spectrometer (LPI SNMS) at Argonne National Lab has recently been upgraded with new tools and probes enabling nanometer-scale analytical capabilities. While tests of the lateral resolution for two fine focused probes (ion and electron) are still in progress, the initial tests of the dual-beam sputter depth profiling capability of SARISA have been completed and demonstrated sub-nanometer depth resolution.