Scanning Probe Charge Reading of Ferroelectric Polarization with Nanoscale Resolution

摘要

A scanning probe charge reading technique (SPCRT) that uses a conductive probe tip electrically connected with a charge amplifier device is applied for the detection of electrical charges associated with alternating polarization domains (bits) in a ferroelectric media. High-speed SPCRT is demonstrated by coupling an array of bits (0.8 um wavelength) with a scanning speed of 5.5 mm/s to modulate the bit signal frequency into the 6.9 kHz data rate range. A variant mode of SPCRT implemented with lock-in technique is also demonstrated to read bit charge signals of 80 nm wide polarizations with 10 nm scale spatial resolution.