Nat. Kay Lab. for Electron. Meas. Technol., North Univ. of China, Taiyuan;
III-V semiconductors; aluminium compounds; cantilevers; displacement measurement; finite element analysis; focused ion beam technology; gallium arsenide; micromechanical resonators; microsensors; optical resonators; photoelasticity; sputter etching; waveguides; FIB; GaAs-Alsub0.6/subGasub0.4/subAs; GaAs-AlGaAs; MEMS sensors; RIE etching; beam propagation method simulation; bus waveguide; cantilever deformation; finite element method simulations; focused ion beam; high-index contrast; mass transmission spectrum;
机译:集成式微环谐振器位移传感器,用于扫描探针显微图像
机译:基于微波传感器应用的基片集成波导上的变容负载互补开口环谐振器的超宽带可调谐谐振器[信函]
机译:基于带裂环谐振器的开放式微带线的反射系数的二维位移和对准传感器
机译:基于微环谐振器的集成式高灵敏度位移传感器的设计与制作
机译:基于微球环形谐振器的生物/化学传感器。
机译:基于共面波导(CPW)的S型开口环形谐振器(S-SRR)加载的角位移和速度传感器
机译:基于带裂环谐振器的开放式微带线的反射系数的二维位移和对准传感器