New method for achieving accurate thickness control for uniform and graded multilayer coatings on large flat substrates

摘要

Abstract: To ensure a high throughput of X-Ray intensity in normal incidence optical systems it is critical to achieve pre-calculated d-spacing variations across the reflecting surfaces. For different optical designs, such as systems having a large aperture or off-axis geometry, there are different requirements for the tolerance in the control of the d-spacing variation. A technique for controlling the d-spacing distribution during the sputtering process and a technique for measuring the d-spacing variation for flat and curved optics will be discussed.!3