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Manufacturing integration of real-time laser interferometry to isotropically etch silicon oxide films for contacts and vias

机译：实时激光干涉测量的制造集成，以各向同性地蚀刻接触点和过孔的氧化硅膜

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Abstract: Two methods, real-time in-situ and pre/post measurement, for control as well as issues associated with the laser interferometry method will be compared and discussed in this paper.!0

机译：摘要：本文将比较和讨论用于控制的实时原位测量和前/后测量两种方法，以及与激光干涉法相关的问题。！0

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来源
《Miroelectronic Processes, Sensors, and Controls》|1993年|p.185-196|共12页
会议地点 Monterey CA(US)
作者
Jake Pope; Jr.; Motorola; Inc.; Mesa; AZ; USA; Robert Woodburn; Motorola; Inc.; Mesa; AZ; USA; J.Watkins; Motorola; Inc.; Mesa; AZ; USA; Roger B. Lachenbruch; Matrix Integrated Systems; Richmond; CA; USA; Gregory C. Viloria; SC Technology; Inc.; Richmond;
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正文语种 eng
中图分类无线电电子学、电信技术;
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4. Manufacturing integration of real-time laser interferometry to isotropically etch silicon oxide films for contacts and vias [C] . Jake Pope, Robert Woodburn, J.Watkins Motorola Inc. Mesa AZ USA, Conference on microelectronic processes, sensors, and controls . 1994

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Manufacturing integration of real-time laser interferometry to isotropically etch silicon oxide films for contacts and vias

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