Nanometer Size Tungsten Markers Formation by a Helium Ion Microscope Equipped with Gas Injection System for Alignment of TEM Tomographic Tilt Series

著录项

• 来源
  《International Metallographic Society Annual meeting;Microscopy Society of America Annual Meeting;Microanalysis Society Annual meeting》|2011年|1002-1003|共2页
• 会议地点 Nashville TN(US)
• 作者

  M. Hayashida; T. Iijima; S. Ogawa; T. Fujimoto;

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• 作者单位

  National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Higashi, Tsukuba, Ibaraki 305-8565, Japan;

  rnNanodevice Innovation Research Center, AIST, 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan;

  rnNanodevice Innovation Research Center, AIST, 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan;

  rnNational Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Higashi, Tsukuba, Ibaraki 305-8565, Japan;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
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