Non-destructive inspection of semiconductor optical waveguide using optical coherence tomography with visible broadband light source

摘要

Non-destructive inspection of semiconductor optical waveguides was demonstrated using optical coherence tomography with a visible broadband light source (vis-OCT). Comparisons of measured height and width between the vis-OCT, stylus profiler, and cross-sectional scanning electron microscopy indicated the effectiveness of the vis-OCT as a high-resolution, non-destructive, and non-contact measurement method.