Key Laboratory for Physical Electronics and Devices of the Ministry of Education Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049, P.R. China;
Key Laboratory for Physical Electronics and Devices of the Ministry of Education Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049, P.R. China;
Key Laboratory for Physical Electronics and Devices of the Ministry of Education Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049, P.R. China;
Key Laboratory for Physical Electronics and Devices of the Ministry of Education Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049, P.R. China;
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, No. 28,Xianning West Road, Xi'an, 710049, P. R. China;
Key Laboratory for Physical Electronics and Devices of the Ministry of Education Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049, P.R. China;
Key Laboratory for Physical Electronics and Devices of the Ministry of Education Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049, P.R. China;
femtosecond laser pulse; interference; periodic structure; micro-grating; micro-fabrication;
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