Fabrication of Micro-Grating Structure on Glazed Stainless-Steel by Two-Beam Holographic Method Using Nanosecond Laser Pulses

摘要

A new method of etching micro-grating structures (MGSs) on the surface of glazed stainless-steel directly is reported, which makes good use of the interference of nanosecond laser pulses. Through changing the experimental parameters such as working current of the laser and source beam diameter, the influences of these parameters on the depth of grooves and duty cycle of MGSs are analyzed. The results measured with conventional optical microscopy and atomic force microscopy (AFM) show that the depth of grooves of MGSs varies from 0 nm to 350 nm, the duty cycle of MGSs changes between 0.4 and 0.9, This method can be used to make a stencil-plate for nano-imprinting. It extends the application of nanosecond laser in laser-induced microstructures, and provides a new method for micromachining micro-optical component.