Fabrication of micro-gratings on Au-Cr thin film by femtosecond laser interference with different pulse durations

摘要

We encoded surface relief micro-gratings on Au-Cr thin films using two-beam interference of femtosecond laser pulses with the durations from 25 fs to 70 fs. The dependence of the fabrication quality on the pulse duration has been investigated both numerically and experimentally. The results revealed that the shorter pulses were preferable to prepare periodical microstructures with minimal ablation fringe width and satisfied fabrication quality. This work has potential applications on periodic functional microstructures fabrication for ultra-fine processing and modification on various materials, especially for intractable materials.