Piezoelectric Micromachined Ultrasonic Transducers and Micropumps: From Design to Optomicrofluidic Applications

摘要

In this work, we present the experimental results of a new wafer-level production platform for aluminum nitride based piezoelectric micromachined ultrasonic transducers (PMUTs), operated by lower than 10 V peak-to-peak signals, and covering ultrasonic frequency ranges from 200 kHz up to 10 MHz, with measured axial displacements ranging from a few nanometers up to 600 nm. The fabricated devices have a low footprint of (130x130) um2. The experimental results are in excellent agreement with finite-element method simulations. The small footprint and driving voltages of these piezo-microactuators are well suited for the development of micropump and micromixer designs for portable microfluidics applications.