Department of Semiconductors, Instruments and Photonics, University of Campinas, Campinas, Brazil;
Department of Semiconductors, Instruments and Photonics, University of Campinas, Campinas, Brazil,Federal Institute of Education, Science and Technology- IFSP, Braganca Paulista, Brazil;
Department of Semiconductors, Instruments and Photonics, University of Campinas, Campinas, Brazil;
机译:用于RF MEMS应用的PECVD氮化硅的制备与表征
机译:高纵横比厚硅晶片模具的制造和使用倒装芯片键合的MEMS应用电镀
机译:在硅衬底上用于MEMS应用的有机PVP掺杂的Ba0.5Sr0.5TiO3厚膜的制备
机译:用于MEMS应用的硅压电晶体管的设计与制造
机译:非晶硅可调谐RF MEMS电感器和变压器的设计,优化和制造。
机译:陀螺仪应用玻璃硅MEMS制造技术的关键工艺
机译:太空应用的碳化硅上硅衬底和功率器件的设计与制造