GLOBALFOUNDRIES, 400 Stonebreak Road Extension, Malta, NY 12020, USA;
GLOBALFOUNDRIES, 400 Stonebreak Road Extension, Malta, NY 12020, USA;
GLOBALFOUNDRIES, 400 Stonebreak Road Extension, Malta, NY 12020, USA;
Nova Measuring Instruments, Inc., 2055 Gateway Place, Ste. 470, San Jose, CA 95110, USA;
Nova Measuring Instruments, Inc., 2055 Gateway Place, Ste. 470, San Jose, CA 95110, USA;
Nova Measuring Instruments, LTD, P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel;
Nova Measuring Instruments, LTD, P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel;
Nova Measuring Instruments, LTD, P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel;
OCD; CD-SEM; critical dimension; hybrid metrology; FinFET; 1X node; high-k; IL;
机译:临界尺寸扫描电子显微镜和光学临界尺寸的混合计量共同优化
机译:重型燃料和发动机的共同优化:成本效益分析和启示
机译:共同优化金属栅极/高k堆栈,以实现EOT =〜1 nm的高90%SiO {sub} 2通用迁移率的高场迁移率
机译:恶魔,赌徒和工程师与计量核对混合系统理论
机译:用于微型/纳米级混合制造的电液动力喷墨印刷的原位计量
机译:优化混合计量:贝叶斯和组合回归的严格实现
机译:燃料与发动机的共同优化:2010财年审查