Nanjing Electronic Devices Institute,Nanjing,210016,PR C;
Nanjing Electronic Devices Institute,Nanjing,210016,PR C;
Notional Key Lab of Science and Technology on Monolithic Integrated Circuits and Modules,Nanjing,210016,PRC;
Nanjing Electronic Devices Institute,Nanjing,210016,PR C;
Notional Key Lab of Science and Technology on Monolithic Integrated Circuits and Modules,Nanjing,210016,PRC;
Nanjing Electronic Devices Institute,Nanjing,210016,PR C;
Nanjing Electronic Devices Institute,Nanjing,210016,PR C;
RF MEMS:Switch:Lateral contact;
机译:使用镍表面微加工的基于气隙的MEMS开关技术
机译:表面微加工RF MEM在GaAs衬底上切换
机译:与GaAs兼容的表面微加工RF MEMS开关
机译:基于表面微机械加工过程的横向RF MEMS开关
机译:铝MEMS微镜的表面微加工制造工艺。
机译:通过表面微加工CMOS MEMS工艺制造的压阻温度传感器
机译:用于可调谐RFmEms无源元件的多金属表面微机械加工工艺