Low temperature growth of piezoelectric AlN films by plasma enhanced atomic layer deposition and magnetoelectric coupling with nickel for energy harvesting applications

机译：通过等离子体增强的原子层沉积以及与镍的磁电耦合，在能量收集应用中低温生长压电AlN膜

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《International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications》|2019年|1-5|共5页
会议地点 Krakow(PL)
作者
Tai Nguyen; Noureddine Adjeroud; Sebastjan Glinsek; Jérôme Guillot; Jérôme Polesel-Maris;
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Luxembourg Institute of Science and Technology LIST Materials Research and Technology Department Belvaux Luxembourg;

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1. A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition [J] . Tai Nguyen, Noureddine Adjeroud, Sebastjan Glinsek, APL Materials . 2020,第7期

机译：通过等离子体增强原子层沉积在低温下生长的AlN薄膜的膜纹理驱动压电性
2. Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures [J] . Ramasis Goswami, Syed Qadri, Neeraj Nepal, Coatings . 2021,第4期

机译：在相对低温下等离子体增强原子层沉积产生的超薄外延ALN膜的微观结构和界面
3. Low-temperature direct synthesis of high quality WS_2 thin films by plasma-enhanced atomic layer deposition for energy related applications [J] . Yeo Seungmin, Nandi Dip K., Rahul R., Applied Surface Science . 2018,第NOVa30期

机译：等离子体增强原子层沉积法低温直接合成高质量WS_2薄膜用于能源相关应用
4. Low temperature growth of piezoelectric AlN films by plasma enhanced atomic layer deposition and magnetoelectric coupling with nickel for energy harvesting applications [C] . Tai Nguyen, Noureddine Adjeroud, Sebastjan Glinsek, International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications . 2019

机译：通过等离子体增强原子层沉积和磁电联轴器与镍的低温生长，镍能量收集应用
5. Plasma Enhanced Atomic Layer Deposition of Cooper Seed Layers at Low Process Temperatures. [D] . Mao, Jiajun. 2012

机译：低工艺温度下库珀种子层的等离子体增强原子层沉积。
6. Structural Optical and Electrical Properties of HfO2 Thin Films Deposited at Low-Temperature Using Plasma-Enhanced Atomic Layer Deposition [O] . Kyoung-Mun Kim, Jin Sub Jang, Soon-Gil Yoon, 2020

机译：等离子体增强原子层沉积在低温下沉积的HfO2薄膜的结构光学和电学性质
7. Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition [O] . Ozgit, C., Donmez I., Alevli, M., 2012

机译：通过等离子增强原子层沉积自限低温生长晶体AlN薄膜
8. Low-temperature Spin Spray Deposited Ferrite/piezoelectric Thin Film Magnetoelectric Heterostructures with Strong Magnetoelectric Coupling. [R] . Zhou, Z., Obi, O., Nan, T. X., 2014

机译：具有强磁电耦合的低温自旋喷涂沉积铁氧体/压电薄膜磁电异质结构。

Low temperature growth of piezoelectric AlN films by plasma enhanced atomic layer deposition and magnetoelectric coupling with nickel for energy harvesting applications

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