Microelectromechanical system (MEMS) based microcantilever sensing platforms for explosive detection: A review

摘要

Explosive-based terrorism has been emerging since most explosives like trinitrotoluene (TNT), hexahydro-1,3,5 trinitroazine (RDX) and pentaerythritol tetranitrate (PETN) are; easy to deploy, cause massive damage and simple to handle. These types of explosives are difficult to detect and require devices that are expensive, time-consuming and large devices which cannot be used at many public places. With the help of miniature sensor devices like microelectromechanical system based microcantilevers which are low cost, more sensitive can overcome this problem. Microcantilever sensors can be fabricated as arrays which can eliminate any inborn noise or surrounding noises and improve the accuracy as well as the sensitivity of the device.