Method of sensing actuation and release voltages of an interferometric modulator comprising microelectromechanical systems (MEMS) and system for carrying out such a method

摘要

A method for sensing the actuation and/or release voltages of a microelectromechanical device include applying a varying voltage to the device and sensing its state and different voltage levels. In one embodiment, the device is part of a system comprising an array of interferometric modulators suitable for a display. The method can be used to compensate for temperature dependent changes in display pixel characteristics.