A 380 GHz sub-harmonic mixer using MMIC foundry based Schottky diodes transferred onto quartz substrate

摘要

In this paper, we report upon the development of a 380 GHz sub-harmonic mixer using foundry planar Schottky diodes. The device has been fabricated by the commercial foundry UMS (United Monolithic Semiconductors) using the BES process, and post-processed afterwards to transfer the GaAs circuit membranes onto a quartz substrate. The measurement of a single device has been done with a fast automatic Y factor test bench, with a resolution of 0.001 dB.