Research status and developing trends of grating nanometer measuring technology

摘要

Along with the progress of rating and signal processing technology, because of its advantages and wide application, grating measuring technology has become a research hotspot in the precision measuring field. Nanometer measuring has become urgently to solve problem with the need of industrial development and scientific research from sub micrometer to nanometer precision measurement. This paper systematically discusses its research status, existing problems, developing trends and other issues about grating nanometer measuring technology. It provides references to grating nanometer measuring technology researches and its development.